| Name | Description | Administer |
|---|---|---|
| Group: Nanofab | ||
| 1530 | 1530 e-beam lithography | |
| 1540XB | 1540XB FIB/SEM | |
| Dicing_Saw | Dicing Saw | |
| DOC | e-Beam Deposition | |
| Edwards | Edwards Sputtering | |
| Ellipsometer | Ellipsometer | |
| HOSER | e-Beam Deposition | |
| MA6 | MA6 Suss mask aligner | |
| MJB3 | MJB3 Suss Mask Aligner | |